A Practical OEM Checklist for Specifying a Wafer Heater

https://mica-heater-journal.sagecurrent.com/posts/how-to-select-the-right-kapton-heater-size-and-wattage

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result